| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer carrier case wherein damages to a wafer and generation of particles are reduces, when the wafer is carried, and deterioration of yield of products is restrained. SOLUTION: In this wafer carrier case 10, a plurality of trenches 4 which are retained by a pair of facing trench-retaining parts 2, 3 in a cabinet 12 are formed at equal intervals in a state of facing each other. In the case 10, wafer- retaining parts 11 for retaining a wafer are arranged on upper surfaces of second sidewalls 7, 9 of at least a pair of the trenches 4 among the respective facing trenches 4.</p> |
