SEMICONDUCTOR MANUFACTURING EQUIPMENT HAVING AUXILIARY VALVE

摘要

PURPOSE: A semiconductor manufacturing equipment having an auxiliary valve is provided to cut off a process chamber and a vacuum pump by compensating the cut-off defect of a main valve in the normal pressure control of the process chamber. CONSTITUTION: The equipment comprises a process chamber(200) for loading a semiconductor substrate, a vacuum pump(201) connecting to the process chamber with a pumping line(202), a main valve(203) closing or opening the pumping line between the process chamber and the vacuum pump, and an auxiliary valve(207) closing the pumping line in case of the malfunction of the main valve. The auxiliary valve is installed on the pumping line between the main valve and the vacuum pump or the process chamber. The main and the auxiliary valve are respectively surrounded by a heating jacket.