发明名称 ORGANIC EL DISPLAY, AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To obtain an organic EL display with excellent light emitting property, preventing a transparent substrate 11 from contacting a metal mask 19, when depositing an organic EL thin film and a negative electrode thin film. SOLUTION: After forming an ITO film 13 and a TFT layer 14 on a transparent substrate 11 through an inter-layer insulation film 12, a mask supporting layer 18 is formed on the inter-layer insulation film 12, and the metal mask 19 with prescribed pattern is superposed on the transparent substrate 11 so as to be supported by the mask support layer 18, and an organic EL thin film 16 and a negative electrode thin film 17 are deposited on the ITO film 13 through the opening of the metal mask 19.
申请公布号 JP2002208484(A) 申请公布日期 2002.07.26
申请号 JP20010004640 申请日期 2001.01.12
申请人 TOHOKU PIONEER CORP 发明人 OSHITA ISAMU;WATANABE TERUKAZU
分类号 H05B33/10;C23C14/04;C23C16/04;G09F9/00;H01L27/32;H01L51/50;H05B33/12;H05B33/22;(IPC1-7):H05B33/10;H05B33/14 主分类号 H05B33/10
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