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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH1131787(A)
申请公布日期
1999.02.02
申请号
JP19970188096
申请日期
1997.07.14
申请人
HITACHI LTD
发明人
INAGAKI MITSUYA
分类号
H01L21/822;H01L21/82;H01L27/04;(IPC1-7):H01L27/04
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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