PHOTO MASK FOR LIGHTENING ROD PATTERN

摘要

PURPOSE: A photo mask for a lightening rod pattern is provided to completely prevent static electricity in the photo mask and to accurately define the lightening rod pattern. CONSTITUTION: A photo mask for a lightening rod pattern includes a shorting bar pattern(1) and a plurality of pad patterns(4), an outer lightening rod pattern(2) connected to the shorting bar pattern, and an inner lightening rod pattern(3) connected to each of the pad patterns. A protrusion is formed at each of the outer and inner lightening rod patterns. The photo mask further includes a fine pattern(6) connected between the protrusions of the outer and inner lightening rod patterns, and a redundancy fine pattern(7) connected between neighboring pad patterns.