| 摘要 |
PURPOSE: A signal shielding interconnection is provided to minimize coupling capacitance and increase a shielding effect, by being formed at both sides of a signal interconnection and by having a dual or triple structure in contact with a contact plug functioning as a shielding wall. CONSTITUTION: The signal interconnection(21) is formed. The first and second shielding interconnections(23,25) having the shielding wall are formed at both sides of the signal interconnection. The contact plug(33,37) for making respective layers of the shielding interconnection come in contact with each other is used as the shielding wall. The number of the shielding walls is controlled according to pattern density.
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