| 摘要 |
PROBLEM TO BE SOLVED: To provide an IC handler, capable of finely adjusting pressurizing force. SOLUTION: Two servo motors 8, 9 are arranged on the upper face of a disk 6, performing the revolving movement of horizontally normal and reverse half-rotation, respective drive shafts 22, 23 driven from the respective motors 8, 9 are fitted to the disk 6, clampers are provided at a position symmetric to the center of the rotation of the disk 6 downward of hanging levers K, M for performing vertically sliding movement via the proper mechanism of the drive shaft, a vacuum suction pad is provided on the lower end face, pneumatic cylinders 28, 29 are interposed on the upward part of the respective clampers, and pressure-regulating equipment, which finely regulates compression air pressure supplied to the pneumatic cylinder is provided.
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