发明名称 |
SAMPLE CARRIER FIXING MECHANISM |
摘要 |
A sample carrier fixing mechanism having a simple structure requiring no drive device for driving clamps for positioning/fixing a sample carrier. A set of clamps is turnably attached to a base through support members. Each clamp includes a mounting portion for mounting thereon the sample carrier, and a fixing portion protruding from the mounting portion for positioning and fixing the mounted sample carrier by turning each clamp. An elastic force is exerted on each clamp so that their end portions can be turned upward. When the sample carrier is mounted on the mounting portions of the clamps, the clamps are turned against the elastic force by the weight of the sample carrier, so that the sample carrier is clamped and fixed by the fixing portions.
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申请公布号 |
WO0250863(A1) |
申请公布日期 |
2002.06.27 |
申请号 |
WO2001JP11079 |
申请日期 |
2001.12.18 |
申请人 |
ADVANTEST CORPORATION;HARA, TOSHIHIKO |
发明人 |
HARA, TOSHIHIKO |
分类号 |
H01J37/20;H01L21/68;H01L21/687;(IPC1-7):H01J37/20 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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