发明名称 |
HEAT-TREATING METHODS AND SYSTEMS |
摘要 |
Methods and systems for heat-treating a workpiece are disclosed. A first method involves increasing a temperature of the workpiece over a first time priod to an intermediate temperature, and heating a surface of the workpiece to a desired temperature greater than the intermediate temperature, the heating commencing within less time following the first time period than the first time period. A second method involves pre-heating the workpiece from an initial temperature to an intermediate temperature, and heating a surface of the workpiece to a desired temperature greater than the intermediate temperature by an amount less than or equal to about one-fifth of a difference between the intermediate and initial temperatures. A third method involves irradiating a first side of the workpiece to pre-heat the workpiece to an intermediate temperature, and irradiating a second side of the workpiece to heat the second side to a desired temperature greater than the intermediate temperature. |
申请公布号 |
WO0247143(A1) |
申请公布日期 |
2002.06.13 |
申请号 |
WO2001CA00776 |
申请日期 |
2001.05.30 |
申请人 |
VORTEK INDUSTRIES LTD. |
发明人 |
CAMM, DAVID, MALCOLM;ELLIOTT, J., KIEFER |
分类号 |
H01L21/265;C30B31/12;F27D19/00;F27D99/00;H01L21/00;H01L21/26;H01L21/268;H01L21/324 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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