发明名称 HEAT-TREATING METHODS AND SYSTEMS
摘要 Methods and systems for heat-treating a workpiece are disclosed. A first method involves increasing a temperature of the workpiece over a first time priod to an intermediate temperature, and heating a surface of the workpiece to a desired temperature greater than the intermediate temperature, the heating commencing within less time following the first time period than the first time period. A second method involves pre-heating the workpiece from an initial temperature to an intermediate temperature, and heating a surface of the workpiece to a desired temperature greater than the intermediate temperature by an amount less than or equal to about one-fifth of a difference between the intermediate and initial temperatures. A third method involves irradiating a first side of the workpiece to pre-heat the workpiece to an intermediate temperature, and irradiating a second side of the workpiece to heat the second side to a desired temperature greater than the intermediate temperature.
申请公布号 WO0247143(A1) 申请公布日期 2002.06.13
申请号 WO2001CA00776 申请日期 2001.05.30
申请人 VORTEK INDUSTRIES LTD. 发明人 CAMM, DAVID, MALCOLM;ELLIOTT, J., KIEFER
分类号 H01L21/265;C30B31/12;F27D19/00;F27D99/00;H01L21/00;H01L21/26;H01L21/268;H01L21/324 主分类号 H01L21/265
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