| 摘要 |
PROBLEM TO BE SOLVED: To provide a motional error measuring device, capable of fully accurate measuring motional errors in an optical device and an optical part having a driving part. SOLUTION: This motional error measuring device is provided with a light source 1, a collimator lens 8a for turning the light from the light source 1 into the parallel light, a reflection surface 4a reflecting these parallel light and arranged on a measuring object stage, image forming lenses 8b and 8c for forming the image of the reflected light from the reflection surface 4a, and detectors 2a and 2b for detecting the image formed light, and motional errors are detected by using a method of an autocollimator.
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