| 摘要 |
PROBLEM TO BE SOLVED: To provide an edge aligner for improving the throughput, while limiting the increase in the size of the system. SOLUTION: Light emitted from a light source unit 40a is led through a light guide 31a and the light emitted from a light source unit 40b is led through a light guide 31b. Since the light guide 31a and the light guide 31 are joined at a joining jig 38 into a light guide 35, each light from two light source units 40a and 40b being guided after all through the light guide 35 to a lens system 29 and cast to an edge part of a substrate (W) held by a spin chuck 13 to carry out an edge exposing process. Then, while the enlarging of the size of system is being restrained, the area of irradiation region is enlarged and the throughput is improved.
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