发明名称 BRUSH CLEANING TOOL OF BRUSH CLEANING APPARATUS
摘要 PURPOSE: A brush cleaning tool of a brush cleaning apparatus is provided to lengthen a life time of a driving source by reducing the unnecessary amount of cleaning solution. CONSTITUTION: A drain port(4) is formed on a center of a bottom portion of a brush waiting port(TP). A multitude of cleaning solution injection nozzle(12) is used for injecting a cleaning solution to a bottom of a brush(1). The cleaning solution injection nozzles(12) are formed on the bottom portion of the brush waiting port(TP). A solution level sensor(8) is used for sensing a level of the cleaning solution. An on/off valve(9) is used for controlling a size of a path of the drain port(4). One or more cleaning solution drain tank(6a,6b) are used for storing the cleaning solution. One or more solution supply pump(10a,10b) are used for supplying the cleaning solution from the cleaning solution drain tank(6a,6b) to the brush waiting port(TP) according to a signal of the solution level sensor(8).
申请公布号 KR20020036458(A) 申请公布日期 2002.05.16
申请号 KR20000066627 申请日期 2000.11.10
申请人 K.C. TECH CO., LTD. 发明人 HA, SANG SU;KIM, JUNG GWAN;LEE, JEONG HO
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
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