发明名称 Apparatus and method for forming thin film of zinc oxide
摘要 The present invention provides an apparatus or a method for forming a thin zinc oxide film on a conductive base member by immersing the conductive base member and a counter electrode in an aqueous solution and supplying a current between the conductive base member and the counter electrode, in which (a) a distance between the counter electrode and the base member is 50 mm or more at an end portion of the counter electrode and is 3 mm to 40 mm at a central portion of the counter electrode, and (b) an end portion of the counter electrode is folded by an angle of -1 DEG to -90 DEG with respect to the conductive base member. Thus the thin zinc oxide film of satisfactory film quality can be formed on the conductive base member for a long time with a satisfactory yield, and inexpensive and stable production of the thin zinc oxide film can be realized. <IMAGE>
申请公布号 AU747371(B2) 申请公布日期 2002.05.16
申请号 AU19990013240 申请日期 1999.01.27
申请人 CANON KABUSHIKI KAISHA 发明人 YUSUKE MIYAMOTO
分类号 H01L31/04;C25D9/08;C25D17/12;H01L31/075;H01L31/076;H01L31/18;(IPC1-7):C25D9/04;C25D21/00 主分类号 H01L31/04
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