SUBSTRATE HOLDER AND THIN FILM FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To realize stable substrate holding and easy release of the substrate after transfer of a thin film. SOLUTION: Related to a thin film forming device, a wafer 1 facing downward is held with a substrate holder 102b. A sheet film 2 on which a thin film is formed is placed on a transfer plate with the surface on which the thin film is formed facing upward. The substrate holder 102b approaches the transfer plate and the thin film is transferred onto the wafer 1. The substrate holder 102b comprises a plurality of substrate holding mechanisms which comprises a movable support 202 which contacts the transfer plate at transferring and rises, and a holding claw 201 which holds the wafer 1 with the substrate mount surface of the holder and, when the movable support 202 rises during holding, releases the wafer by rotating.