| 摘要 |
PURPOSE: An actuator is provided, which generates a flow at an object surface using a phase delay when a flow is pumped toward a cantilever from a fixed plate. CONSTITUTION: The actuator(100) comprises a membrane actuator unit(10) where a membrane(30) is vibrated and transformed by an electrostatic force according to an AC voltage applied between an electrode(20) and the membrane, and a pump unit(50) absorbing a fluid on the fixed plate into a pump chamber(80) and then exhausting the fluid toward an upper part of a cantilever(60) as a phase of the cantilever is delayed by a vibration transformation of the membrane. The membrane actuator unit comprises a driving case(12) where a driving chamber(40) is formed, the membrane covering an upper surface of the driving chamber, the electrode, and a power supply part to apply an AC voltage to the electrode.
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