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发明名称
Remover solution composition for resist and method for removing resist using the the same
摘要
申请公布号
EP0773480(B1)
申请公布日期
2002.04.24
申请号
EP19960118205
申请日期
1996.11.13
申请人
TOKYO OHKA KOGYO CO., LTD.
发明人
TANABE, MASAHITO;WAKIYA, KAZUMASA;KOBAYASHI, MASAKAZU;NAKAYAMA, TOSHIMASA
分类号
C11D7/10;C11D7/26;C11D7/32;C11D7/50;C11D17/08;G03F7/42;H01L21/027;(IPC1-7):G03F7/42
主分类号
C11D7/10
代理机构
代理人
主权项
地址
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