Improved optical reflector for micro-machined mirrors

摘要

A micromachined reflector comprising a planar substrate (146) and a reflective layer (147) secured to the planar substrate. The reflective layer has a stress. An additional layer (148) of material is secured to the reflective layer. The additional layer has a stress substantially opposing the stress of the reflective layer. The stress of the additional layer substantially offsets the stress of the reflective layer to enhance the planarity of the micromachined reflector.