| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical observation microscope which can be connected to a semiconductor-related device, is simple, small-sized, and low-priced, and can easily be moved. SOLUTION: This microscope is equipped with a housing K which has its housing width WID less than twice as large as the diameter of a wafer W as a body to be inspected and its housing depth DEP based upon the depth d1 of a load port LP of the semiconductor-related device D and optical observation heads L1, L2, and CCD provided in the housing K. The housing K has a part CNC connected to a connection part of the load port LP of the semiconductor-related device D, and there is not space filter between objective systems L1 and L2 in the optical observation heads and the wafer W, and the housing K is movable.
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