| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator having pre-compressed load structure capable of simply and effectively performing the characteristic estimation of a laminated piezoelectric-element during high frequency drive. SOLUTION: This pre-compressed load structure is provided with a bar spring 3 fixed and supported to be sandwiched between holding blocks 5a, 5b interposing collet 4 so that both end sides make a fixed span variable in the direction orthogonal to the compression direction of the laminated piezoelectric element 1 and in contact with one end side of the piezoelectric element 1 through a piece 6 (a stress relaxation member attached by a nut 8 on the center of a diaphragm) deflectable and deformable on the center part, a hollow jig case body 21 storing the piezoelectric element 1, and a plunger 10 interposing a load cell 21 capable of measuring the compressed load for the piezoelectric element 1 and mounted movably in the expansion and contraction direction of the piezoelectric element 1 on the case body 21 in the state that the other end side of the piezoelectric element 1 is in contact. The case body 21 and the plunger 10 are smoothly and oppositely restrained. |
