发明名称 Fluid control apparatus and gas treatment system comprising same
摘要 <p>A fluid control apparatus comprises lines A1, A2, A3, A4, A5, B1, B2, B3 each removably attached to a substrate 1 by a plurality of brackets 8, 9, 18, 19, 20, and channel communication means 47, 48 which are removable upward. <IMAGE></p>
申请公布号 EP1191265(A2) 申请公布日期 2002.03.27
申请号 EP20010121283 申请日期 2001.09.05
申请人 FUJIKIN INC. 发明人 FUJIMOTO, HIDEKI;UZAWA, NOBORU;SATO, NAOYUKI;YAMAJI, MICHIO;TANAKA, SHIGEAKI;KAWANO, YUJI;OMATA, YASUJUKI;FUKUI, MASAKAZU
分类号 F17D1/02;F15B1/00;F16K27/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):F16K27/00 主分类号 F17D1/02
代理机构 代理人
主权项
地址