摘要 |
<p>A fluid control apparatus comprises lines A1, A2, A3, A4, A5, B1, B2, B3 each removably attached to a substrate 1 by a plurality of brackets 8, 9, 18, 19, 20, and channel communication means 47, 48 which are removable upward. <IMAGE></p> |
申请人 |
FUJIKIN INC. |
发明人 |
FUJIMOTO, HIDEKI;UZAWA, NOBORU;SATO, NAOYUKI;YAMAJI, MICHIO;TANAKA, SHIGEAKI;KAWANO, YUJI;OMATA, YASUJUKI;FUKUI, MASAKAZU |