| 摘要 |
In a vacuum exhaust valve in which a valve seat in a flow path connecting a chamber port and a pump port is opened and closed by a valve body, a flow rate adjusting portion in a gradually-tapered shape to be fitted in an inner hole of the valve seat is provided to the valve body in addition to a valve sealing member for opening and closing the valve seat in a poppet manner and the flow rate adjusting portion functions to gradually increase an exhaust flow rate when the valve body opens.
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