发明名称 Methods for and products of modification and metallization of oxidizable surfaces, including diamond surfaces, by plasma oxidation
摘要 The present invention concerns a process for modifying oxidizable surfaces, including diamond surfaces, including methods for metallizing these surfaces, where these methods include oxidation of these surfaces. The present invention also relates to the products of these methods.In this process, a surface is first plasma oxidized, usually under an RF O2 plasma. Chemical functional groups are then attached to the surface. If the surface is to be metallized, the chemical functional groups are selected to be catalyzable, the surface is then catalyzed for electroless metallization, and the surface is finally treated with an electroless plating solution to metallize the surface.If modified surface is to be patterned, the modified surface is exposed through a mask to pattern the surface after the attachment of the chemical functional groups.
申请公布号 US6348240(B1) 申请公布日期 2002.02.19
申请号 US19920933147 申请日期 1992.08.21
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY 发明人 CALVERT JEFFREY M.;PEHRSSON PEHR E.;PECKERAR MARTIN C.
分类号 C23C18/18;C23C18/16;C23C18/20;C23C18/28;H05K3/18;H05K3/42;(IPC1-7):B05D1/00;B05D3/06;H05H1/24 主分类号 C23C18/18
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