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发明名称
摘要
申请公布号
JP3257742(B2)
申请公布日期
2002.02.18
申请号
JP19940044468
申请日期
1994.03.15
申请人
发明人
分类号
H01L21/027;G03F7/20;(IPC1-7):H01L21/027
主分类号
H01L21/027
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