METHOD TO REDUCE WARPAGE AND POLARIZATION SENSITIVITY OF PLANAR DEVICES

摘要

An optical device (10) is provided including a substrate (12) having an underclad layer (14), a core layer (18), and a pair of overclad layers (20, 22) deposited thereon. The substrate (12) has a first coefficient of thermal expansion. The underclad layer (14) has a first index of refraction. The first overclad layer (20) has an index of refraction which is approximately equal to the first index of refraction. The second overclad layer (22) has a coefficient of thermal expansion which is greater than the first coefficient of thermal expansion.