Electron detector with high back-scattered electron acceptance for particle beam apparatus,申请号EP19950109468-传众专利搜索

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发明名称	Electron detector with high back-scattered electron acceptance for particle beam apparatus
摘要
申请公布号	EP0689063(B1)	申请公布日期	2002.01.23
申请号	EP19950109468	申请日期	1995.06.19
申请人	APPLIED MATERIALS ISRAEL LTD.	发明人	LITMAN, ALON;GOLDENSTEIN, ALEXANDER;ROGERS, STEVEN R.
分类号	G01N23/225;G01R19/00;G01T1/29;H01J37/244;H01J37/256;(IPC1-7):G01T1/29;G01T1/28	主分类号	G01N23/225
代理机构		代理人
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地址

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