VACUUM DEPOSITION APPARATUS, AND VACUUM DEPOSITION METHOD USING THE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a vacuum deposition apparatus, and a vacuum deposition method which can efficiently remove a metal layer deposited on an inner circumferential surface of a masking tape and prevent an oil for preventing the vapor deposition from coming around an outer circumferential surface of the endless masking tape and adversely affecting a polymer film. SOLUTION: This vacuum deposition apparatus is provided with a metal layer peeling roll 10 which can be advanced/retracted between a first position at which a circumferential surface thereof is pressed against the outer circumferential surface of the masking tape 7 to allow the masking tape to meander and a second position at which the circumferential surface thereof is not pressed against the outer circumferential surface of the masking tape 7 not to impede the rotational traveling of the masking tape 7 so that the metal layer vapor- deposited on the inner circumferential surface of the endless masking tape 7 via the metal layer peeling oil is peeled.