MANUFACTURING METHOD AND DEVICE OF WIRE MATERIAL OF SUPERCONDUCTIVE OXIDE

摘要

PROBLEM TO BE SOLVED: To enable to sufficiently bring out superconductive characteristics which a thin film of superconductive oxide originally has, in the event of manufacturing a long wire material of superconductive oxide in which the thin film of superconductive oxide is formed on a substrate. SOLUTION: The manufacturing method of the wire material of superconductive oxide has a process of radiating a laser beam on a target 48 and forming the thin film of superconductive oxide in a film forming room 45 in which particles scattered out from the target 48 are deposited on a long substrate 42 conveyed and supplied in a longitudinal direction, a process of heat-treating the substrate 42 in an oxygen atmosphere so that the temperature of the substrate 42 in the oxygen atmosphere is lower than that of the substrate 42 in the atmosphere wherein the thin film of superconductive oxide is formed by the substrate 42 on which the thin film of superconductive oxide formed is further conveyed and supplied in a longitudinal direction, and a process in which the substrate 42 heat-treated in the oxygen atmosphere is further conveyed and supplied in a longitudinal direction and in which the substrate 42 is conveyed to a substrate winding 47 to wind up the substrate 42.