SUBSTRATE PROCESSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing system capable of preventing a dispersed mist in cup from adhering to a substrate again. SOLUTION: A fin 93 as a first guide member for guiding the atmosphere dispersed by the centrifugal force of a rotating substrate (G) to a lower part of an inner wall of an outer cup 57 is provided in the inner wall of the outer cup 57. Similarly, a fin 94 as a third guide member for guiding the atmosphere dispersed by the centrifugal force of the rotating substrate (G) to a lower part of an inner wall of an inner cup 58 is provided at the inner wall of the inner cup 58. Under the outer cup 57 and the inner cup 58, a fin 95 is fixed to an upright wall 64 in a way that the fin 95 is astride a lower side of the outer cup 57 and a lower side of the inner cup 58.