CLEAN WORK MODULE AND CLEAN TUNNEL

摘要

PROBLEM TO BE SOLVED: To discharge flow-down clean air from the lower part of a work unit and easily change the work unit. SOLUTION: In a clean work module 1, the work unit 4 is attached to a clean space 3 to which the flow-down clean air 2 is supplied and a prescribed work is carried out in the clean space 3 by the work unit 4. An opening part 10 is provided on the main body wall parts 7 and 8 forming the clean space 3 and at a part opposite to a working opening 9. A combined and movable unit 6 is provided from the part opposite to the working opening 9 so as to cover the opening part 10 therewith. The work unit 4 is attached to the front surface of the movable unit 6.