DAMPED MICROMECHANICAL DEVICE AND METHOD FOR MAKING SAME

摘要

A damped micromechanical device (2) comprising a substrate (23), a movable structure (28) overlying the substrate and a flexural member (37) having a first end portion (37a) coupled to the substrate and a second end portion (37b) coupled to the movable structure. The movable structure is movable at a resonant frequency between first and second positions relative to the substrate. A damping material (112) is adhered to at least a portion of the flexural member for damping the movement of the movable structure at the resonant frequency. A method for making the micromechanical device is provided.