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发明名称
Ansteuerung für mikromechanische und elektrostatisch betriebene Spiegelanordnungen
摘要
申请公布号
DE19650895(C2)
申请公布日期
2001.12.13
申请号
DE19961050895
申请日期
1996.12.07
申请人
CMS MIKROSYSTEME GMBH CHEMNITZ
发明人
RAUCH, MANFRED;SCHMIDT, KARSTEN;MARKERT, JOACHIM
分类号
G02B26/08;H02N1/00;H02N2/06;H04N5/74;(IPC1-7):B06B1/02;G02B26/00
主分类号
G02B26/08
代理机构
代理人
主权项
地址
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