| 发明名称 |
Verfahren zur Aufreinigung von Wasserstoffperoxidlösungen |
| 摘要 |
The invention relates to a novel chromatographic method for the purification of hydrogen peroxide solutions, which gives highly pure solutions which may be used in semiconductor technology, under the latest stringent purity conditions. |
| 申请公布号 |
DE10026363(A1) |
申请公布日期 |
2001.11.29 |
| 申请号 |
DE2000126363 |
申请日期 |
2000.05.27 |
| 申请人 |
MERCK PATENT GMBH |
发明人 |
OETER, DIETMAR;DUSEMUND, CLAUS;NEUMANN, EWALD;FREISSLER, KLAUS;HOSTALEK, MARTIN |
| 分类号 |
B01D15/00;B01D15/02;B01D15/04;B01D15/08;B01J20/26;B01J20/281;B01J41/04;B01J41/14;C01B15/013;(IPC1-7):C01B15/013 |
主分类号 |
B01D15/00 |
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