发明名称 Angled implant to improve high current operation of bipolar transistors
摘要 Method and apparatus for improving the high current operation of bipolar transistors while minimizing adverse affects on high frequency response are disclosed. A local implant to increase the doping of the collector at the collector to base interface is achieved by the use of an angled ion implant of collector impurities through the emitter opening. The resulting area of increased collector doping is larger than the emitter opening, which minimizes carrier injection from the emitter to the collector, but is smaller than the area of the base.
申请公布号 US2001046732(A1) 申请公布日期 2001.11.29
申请号 US20010921948 申请日期 2001.08.03
申请人 发明人 VIOLETTE MICHAEL
分类号 H01L21/265;H01L21/331;H01L29/08;(IPC1-7):H01L21/824 主分类号 H01L21/265
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