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发明名称
MICROFABRICATED TEMPLATE FOR MULTIPLE CHARGED PARTICLE BEAM CALIBRATIONS AND SHIELDED CHARGED PARTICLE BEAM LITHOGRAPHY
摘要
申请公布号
KR20010100758(A)
申请公布日期
2001.11.14
申请号
KR1020017000065
申请日期
2001.01.03
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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