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发明名称
Duse für Reaktionsgase
摘要
申请公布号
DE69706936(D1)
申请公布日期
2001.10.31
申请号
DE19976006936
申请日期
1997.10.13
申请人
EBARA CORP., TOKIO/TOKYO
发明人
FUKUNAGA, YUKIO;SHINOZAKI, HIROYUKI;TSUKAMOTO, KIWAMU;SAITOH, MASAO
分类号
C23C16/44;C23C16/455;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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