MICROVALVE DEVICE AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To simplify a manufacturing process of a micro fluid device. SOLUTION: A one-way micro valve device or a three-way micro valve device A is formed by one or plural one-way micro valve units 3. A figure shows an example of the three-way micro valve device, where working fluid passages are respectively formed from input ports In1 and In2 and an output port Out, and joined at a center of a chip. Each passage has the one-way micro valve unit 3. The one-way micro valve unit 3 is normally closed by the contact of a membrane and a valve seat. The external driving air negative pressure is supplied through control ports C1, C2 and C3, whereby the membrane is displaced in the direction to open the one-way micro valve unit 3.