SUBSTRATE CASSETTE APPARATUS

摘要

PURPOSE: A substrate cassette apparatus is provided to make the interval between sensors and to prevent a substrate from being damaged by a contact between the sensor and the substrate, by detecting the substrate received in a plurality of cassettes at a corner of the substrate. CONSTITUTION: A plurality of substrates(2) are almost horizontally received in the plurality of cassettes(1). A position determining block supports the plurality of cassettes to make the cassettes exchanged, attached to a supporting unit. A plurality of sensors are disposed in such a manner that whether the respective substrates are detected in a horizontal direction at the corner of the substrate received in the cassette. A sensor holder supports the plurality of sensors. A bearing supports the lower portion of the sensor holder while rotating. A driving unit transfers the holder until the sensor is positioned near the corner of the plurality of cassettes.