METHOD FOR MANUFACTURING MASTER DISK FOR OPTICAL DISK

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing the master disk for an optical disk by which a pattern of minute recesses and projections of high resolution can be formed with high throughput. SOLUTION: The substrate is subjected to the surface treatment by using at least one agent selected from organic silicon compounds having at least one kind of hydrolyzable group and generating no base and vinyl polymers having at least one kind of hydrolyzable groups to obtain a surface treated medium 101 to improve the adhesion between the substrate and a resist film. A resist composition containing a medium having such reactivity that the solubility in an alkali aqueous solution changes by the reaction with an acid as a catalyst, and further containing a compound which generates as acid by irradiation of radiation is applied on the surface-treated substrate to form a resist film 103. The film is irradiated with radiation, developed and etched to form minute recesses in the substrate.