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发明名称
DEVICE AND METHOD FOR PROCESSING SUBSTRATES
摘要
申请公布号
EP1145289(A1)
申请公布日期
2001.10.17
申请号
EP19990956014
申请日期
1999.11.18
申请人
STEAG MICROTECH GMBH
发明人
POKORNY, JOACHIM
分类号
H01L21/677;H01L21/00;H01L21/304;(IPC1-7):H01L21/00
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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