| 摘要 |
PROBLEM TO BE SOLVED: To facilitate transporting or modifying a polisher and improve the throughput by separating parts of the polisher into modules. SOLUTION: The unit-separated polisher 1 is composed of five modules which more an index part 2, loader-unloader 3, polishing unit 4, cleaner 5 and electrical unit 6, and each module is individually independent, including its casing and assembled, using fixtures, etc. The loader-unloader has transport robots 31, 32 in an upper and lower stages, and the polishing unit has three platens 41 and two polishing heads 42. |
