| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraminiature vertical cross-sectional image measurement device with an ultraminiature interference optical system including a space delay type Fizeau interferometer, using a collimator lens. SOLUTION: This measurement device has a low-coherence surface light source 1, an irradiation optical system having the collimator lens 2, image forming interference optical system, beam division type phase modulator 5, high-voltage signal generator 6 connected to the modulator 5, objective lens 7, biological sample 8, heterodyne image detector 10, amplitude detector 11 and image monitor 12.
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