LASER PLOTTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser plotting device which performs the reduction magnification correction processing of a plotting pattern to the size fluctuation of a processing object with high accuracy. SOLUTION: In the laser plotting device which modulates a laser beam by a acoustooptic modulator 53 based on luster data read by a plotting clock signal, deflectes the modulated laser beam in a main scanning direction by a polygon mirror 67 to irradiate a substrate on a plotting stage 5 and displaces the plotting stage 5 in the subscanning direction to plot the pattern, a plotting clock generating circuit 123 which adjusts a plotting clock signal f to a fixed frequency over one scanning line according to a reduction magnification correction factor j (reduction magnification correction data) is equipped.