Chamber cleaning mechanism

摘要

An apparatus for cleaning a reaction chamber which has a chamber, a blade apparatus and a reciprocable rotating unit. The chamber has a wall with an interior surface. The blade apparatus has at least one annular mounting member and at least three scraping blades attached peripherally about the annular mounting member and arranged in a parallel relationship to a longitudinal axis of the chamber. The reciprocable movement unit has a reciprocable member pivotally connected at a peripheral position to the blade apparatus. The reciprocable movement unit rotates the scraping blade(s) circumferentially back and forth along the interior surface of the chamber to scrape its interior surface.