发明名称 |
Method for fabricating a sealed-cavity microstructure |
摘要 |
A sealed cavity microstructure and an associated fabrication method are provided that incorporate both a tight pressure seal and a rugged structural bond. A rugged microstructure device incorporating a pressure-maintained cavity may thereby be fabricated. A vacuum cavity microbolometer is also provided that is fabricated using the associated method. The sealed cavity microstructure and the vacuum cavity microbolometer are thereby adapted to low-cost wafer-scale batch processing.
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申请公布号 |
US2001022207(A1) |
申请公布日期 |
2001.09.20 |
申请号 |
US20010836785 |
申请日期 |
2001.04.17 |
申请人 |
HAYS KENNETH MAXWELL;BISIGNANO ALAN GLENN;FITZGIBBONS EUGENE TIMOTHY |
发明人 |
HAYS KENNETH MAXWELL;BISIGNANO ALAN GLENN;FITZGIBBONS EUGENE TIMOTHY |
分类号 |
G01J5/20;(IPC1-7):C09J1/00 |
主分类号 |
G01J5/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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