发明名称 Method for fabricating passivated semiconductor devices
摘要 A wafer-level process for fabricating a plurality of passivated semiconductor devices comprising the steps of providing a semiconductor wafer on that at least one p-n junction is formed, Cutting a plurality of grooves in said wafer to expose said at least one p-n junction, wherein each of said grooves extends partly through the wafer and has a depth that is enough to expose said at least one p-n junction, applying a passivating material into said grooves and curing the material. The grooves can be formed by using a disc saw having a blade, by performing a sandblasting operation within a controlled operation time, or by performing a photolithographically chemical etching process. The passivating material is either screen-printed or pin-dispensed into the grooves. A dicing operation can be subsequently proceeded to divide the wafer into individual chips for subsequent fabrication into completed semiconductor devices.
申请公布号 US6291316(B1) 申请公布日期 2001.09.18
申请号 US19990233706 申请日期 1999.01.19
申请人 GENERAL SEMICONDUCTOR OF TAIWAN, LTD 发明人 KNOWLES CHRISTOPHER MICHAEL;LIN YIH-YIN;LIN TUNG-CHIEH;NELSON WILLIAM JOHN;TSAI HUNG-PING;O'ROURKE RICHARD SEAN
分类号 H01L21/306;H01L21/329;H01L21/56;H01L21/762;H01L23/31;(IPC1-7):H01L21/46;H01L21/78;H01L21/301;H01L21/76;H01L21/31 主分类号 H01L21/306
代理机构 代理人
主权项
地址