| 摘要 |
PROBLEM TO BE SOLVED: To provide a moving device provided with a small hydrostatic bearing needing no overhaul, suppressing manufacturing cost, and improving accuracy and rigidity of a being device. SOLUTION: When a load is applied to a moving member 101, the hydrostatic bearing provided in this moving device generates force opposing the load with respect to changes in bearing clearances 110a and 110b. It is provided with a moving body 119 moving while holding a magnetic means 113, a support body 108 provided with a guide 108a supporting or moving the moving body 119, and a driving mechanism 112 driving the moving body 119 and/or the support body 108. It has control means 121, 122, 123, 124, and 125 controlling the bearing clearances 110a and 110b between a face formed with a magnetic body material 118 and a face opposing said face and formed with the magnetic means 113, and a detecting means 120 detecting displacement of the moving member 101. |
