| 摘要 |
<p>PROBLEM TO BE SOLVED: To maintain the positioning accuracy of a substrate without relying excessively on temperature control accuracy. SOLUTION: A stage device is provided with holder WH1 and WH2 which respectively hold substrates W1 and W2, and a position detector 9 which detects the positions of the substrates W1 and W2, based on reflected light rays from mobile mirrors 20 and 22 positioned in prescribed positional relations with the holders WH1 and WH2. The base materials of the mirrors 20 and 22 and holders WH1 and WH2 are composed ceramics, having coefficients of thermal expansion of 1×10-6/ deg.C or lower.</p> |
