| 摘要 |
PURPOSE: Provided is a digital X-ray detector which, using thin film transistor, diagnoses in real time right after taking X-ray picture while conventional X-ray test has to take picture and wait until film is developed. CONSTITUTION: The detector comprises the base board where switching and picture part are defined; active layer, being located at the switching part, is composed of gate electrode (202), insulating layer, amorphous silicone and impure amorphous silicone and thin film transistor possessing source (212) and drain electrode (214); connecting lines (232) which are located at the picture part and are composed of same material as above source and drain electrode; protecting layer covering above thin film transistor, above connecting lines and all the base board; capacitor electrode (202) which is located on the above protecting layer in the picture part; the insulating layer between the first zones which is located on the above picture electrode and protecting layer; picture electrode (222) located on the insulating layer between the first zones in the picture part; the insulating layer between the second zones which is situated on picture electrode and the insulating layer between the first zones and possesses 1, 2, 3, 4, contact holes exposing the above picture electrode, drain electrode (214), capacitor electrode and the connecting lines . The part of detector is shown as a cut-off cross section view along the cut-off line of figure 6. The picture electrode (222) is exposed from insulating layer between the second zones to collect the electric charge from photo-conductive layer in later process. The exposure of picture electrode (222) proceeds by dry etching method through the mask of connecting electrode (236, 242).
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