| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sensor having small errors and high sensitivity, capable of simultaneously detecting strain and temperature, without needing a compensation circuit by solving the problem, where the conventional strain and temperature simultaneously detecting sensors have inferior sensitivity, large errors and needs compensation circuit. SOLUTION: The composite sensor, capable of simultaneously detecting temperature and strain (or pressure) without using the compensation circuit, can be provided by making a parallel structure or a laminating structure of two thin-film resistors having greatly different characteristics, namely a temperature detection thin film in which temperature sensitivity is large and strain sensitivity (or pressure sensitivity) is small and a strain detection thin film, in which the strain sensitivity (or sensitivity), is large and the temperature sensitivity is small.</p> |
