| 摘要 |
PURPOSE: An RF(Radio Frequency) matching box is provided to reduce a time required in an RF matching and at the same time to prevent the damage of an RF oscillator due to the inflow of excessive reflected wave. CONSTITUTION: A variable impedance part(1) varies an impedance by being combined between an output terminal of an RF oscillator(6) and an input terminal of a load. An initial impedance set part(2) determines an initial impedance of the variable impedance part. An impedance variable control part(3) varies the impedance of the variable impedance part from the initial value. A sensing part(4) outputs a detection signal according to the amplitude of a reflected wave by sensing an output signal of the RF oscillator. And a matching impedance detection part(5) detects and memorizes a matching impedance with the lowest reflected wave by receiving the detection signal from the sensing part while the impedance of the variable impedance part varies. The impedance variable control part controls the impedance of the variable impedance part according to the matching impedance detected from the matching impedance detection part.
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